[PDF.17nf] Tribology In Chemical-Mechanical Planarization

Tribology In Chemical-Mechanical Planarization

[PDF.bo22] Tribology In Chemical-Mechanical Planarization

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 | #5875397 in Books |  CRC Press |  2005-03-01 | Original language:English | PDF # 1 |  9.60 x.63 x6.58l,1.03 | File type: PDF | 200 pages

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The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization (CMP) technology, particularly when applied to nanosurfaces. Tribology in Chemical-Mechanical Planarization presents a detailed account of the CMP process in a language that is suitable for tribology professionals as well as chemists, materials scientists, physicists, and other applied scientists an...

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